Kalrez® Semiconductor Industry
  The success of Kalrez® has been field-proven in the manufacture of semiconductors, where processing steps can involve extremes of both thermal and chemical exposure.
 
The suggested products for the Semiconductor Industry are:
Kalrez® 9100 – An amber translucent product targeted specifically for deposition process applications, i.e. HDPCVD, PECVD, SACVD, Metal CVD, ALD, etc.

Kalrez® 9300 – A brown product for all etch processes. It has been specifically designed for use in applications where the plasma environment is a combination of ions and radicals.

Kalrez® 9500 – A tan product targeted specifically for deposition processes where ozone is used for processing. It has been specifically designed for use in applications where the plasma environment is more “chemical”.

Kalrez® 8002 – A clear, transparent product targeted for “select” plasma process applications, i.e. deposition, etching, ashing/stripping.

Kalrez® Sahara ™ 8085 – A beige, general purpose product for etching, ashing/stripping and deposition process applications, i.e. HDPCVD, PECVD, and SACVD.

Kalrez® 8900 – A black product that has been specifically developed for semiconductor thermal processes, i.e. oxidation, diffusion furnace, metal CVD, ALD, and LPCVD.

Kalrez® Sahara™ 8475 – A white product specifically developed to meet the challenging requirements associated with sealing applications in semiconductor thermal processes, i.e. oxidation, diffusion, furnace, LPCVD, RTP and lamp anneal.

Kalrez® 6375UP – A black product for wet process applications. This product exhibits excellent chemical resistance to all types of wet process chemicals, acids and bases.

Kalrez® Bonded Door Seals – Available in 9100, 8002 and Sahara® 8085, these seals significantly improve both particle generation and sealing performance over conventional o-rings for etching, ashing/stripping, HDPCVD, PECVD, SACVD, Metal CVD, and ALD wafer processing applications.